Electrical performance of flexible Al2O3/In2O3 bio-FETs
(A) Schematic illustration of the structure of a flexible Al2O3/In2O3 bio-FET
(B) A digital photo of the flexible device under bending. Scale bar: 1 cm.
(C) Transfer characteristics of the flexible Al2O3/In2O3 FETs at flat states (black) and under bending with bending radii of 2 (blue) and 1 cm (red). Solid lines: Ids curves in logarithmic scales; solid circles: Ids curves in linear scales; open circles: Igs curves.
(D) Transfer characteristics of flexible Al2O3/In2O3 device after different bending test cycles with the bending radius of 1 cm. Solid lines: Ids curves in logarithmic scales; solid circles: Ids curves in linear scales; open circles: Igs curves.
(E) Corresponding threshold voltage (Vth) and subthreshold swing (SS) values extracted from transfer curves as a function of bending test cycle number. Error bar stands for standard deviations of three tests.
(F) Transfer curves of the flexible device measured at different days. Solid lines: Ids curves in logarithmic scales; solid circles: Ids curves in linear scales; open circles: Igs curves.