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. Author manuscript; available in PMC: 2022 Feb 1.
Published in final edited form as: Surf Interfaces. 2021 Nov 28;28:101645. doi: 10.1016/j.surfin.2021.101645

Table 4.

Atomic percentage (At%) shows the elemental composition of A-Ti, SiON-Ti, and SiONP-Ti as reported from EDX analysis.

at (%) N O Si P Ti
Pure-Ti — 21.7±1.9 — 0.512±0.07 77.04±2.8
SiON 19.1±3 9.9±1.38 41.1±2 — 29.9±2
SiONP 14.48±1.8 6.035±2 43.59±2.5 3.47±0.36 32.41±2