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Mechanical properties of A-Ti, SiON-Ti, and SiONP-Ti as calculated from the Vickers hardness and nano-indentation tests.
| Vickers hardness | Nano-indentation | ||||
|---|---|---|---|---|---|
| Hardness (HV) | Hardness (GPa) | Reduced modulus (GPa) | Hardness (GPa) | hMax (nm) | |
|
| |||||
| A-Ti | 198.1±6.8 | 1.92±0.07 | 139.7±26 | 1.97±0.4 | 440±31 |
| SiON-A-Ti | 199.9±4.9 | 1.95±0.05 | 147±15 | 3.05±1.1 | 302±43 |
| SiONP-A-Ti | 206.1±4.2 | 2.01±0.04 | 160±24 | 6.7±0.99 | 224±30 |
