Skip to main content
. 2022 Jan 3;15(1):334. doi: 10.3390/ma15010334

Figure 5.

Figure 5

XRR results of the IGZO films deposited at different R[H2] and at fix R[O2] of 1%: (a) as-deposited; (b) after annealing in air for 1 h at the annealing temperature of 150 °C. The insets show the reflectivity intensity near the critical angle representing the change in film density upon the hydrogen incorporation.