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Relative area ratio of the metal-oxygen (M–O), oxygen vacancies (VO) and oxygen-hydrogen (OH) of the conventional IGZO film before and after annealing in air for 1 h after deconvolution of O 1s spectra.
| Temperature | M–O (%) | VO (%) | OH (%) |
|---|---|---|---|
| As-deposited | 67.70 | 27.35 | 4.95 |
| Tann = 300 °C | 68.63 | 26.42 | 4.95 |
