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Relative area ratio of the metal-oxygen (M–O), oxygen vacancies (VO) and oxygen-hydrogen (OH) in the IGZO and IGZO:H films before and after annealing in air for 1 h after deconvolution of O 1s spectra.
| Temperature | R[H2] (%) | M–O | VO | OH |
|---|---|---|---|---|
| As-deposited | 0 | 67.70 | 27.35 | 4.95 |
| 8 | 61.28 | 26.08 | 12.63 | |
| Tann = 300 °C | 0 | 68.63 | 26.42 | 4.95 |
| Tann = 150 °C | 8 | 64.09 | 25.08 | 10.83 |
