Table 4.
IGZO and IGZO:H film density (g/cm3) change after deposition at different R[H2].
| R[H2] (%) | 0 | 2 | 5 | 8 |
|---|---|---|---|---|
| As-deposited | 6.124 | 6.049 | 5.926 | 5.913 |
| Tann = 150 °C | 6.075 | 6.035 | 5.985 | 5.922 |
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