Table A1.

In situ Hall measurement parameters utilized for analysis of the conventional and hydrogen-containing IGZO films performed in air atmosphere.

R[H2] (%)	Temperature Range (°C)	Excitation Current	Hall Mode
0	40–110	100 nA	AC
	120–150	10 μA
	160–200	50 μA
	210–250	300 μA	DC
	260–300	50 μA
2	40–60	100 μA	DC
	70–100	20 μA
	110–150	5 μA
	160–200	1 μA
	210–250	500 nA
5	40–100	1 mA	DC
	110–180	10 μA
	190–250	300 nA	AC
8	40–90	1 mA	DC
	100–130	1 μA	AC
	140–200	20 nA
	210–250	5 nA