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Hall effect mobility (cm2/Vs) obtained by measurements of the IGZO and IGZO:H films before and after annealing for 1 h in ambient air at different temperature using a hot plate.
| R[H2] (%) | 0 | 2 | 5 | 8 |
|---|---|---|---|---|
| As-deposited | 9.6 | 13.0 | 16.0 | 13.0 |
| Tann = 150 °C | 13.5 | 15.0 | 13.0 | 12.7 |
| Tann = 200 °C | 17.8 | 13.5 | 12.3 | 11.3 |
