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Room temperature I–V characteristics of MIS structures with ZnO:N films, deposited at Ar:O2:N2 = 50:10:40 (sample 2.1) (a) and after RTA at 550 °C (sample 2.3) (b). The initial and return stages of the I–V measurements are denoted with empty and full triangles, respectively. The corresponding I–V curves in the reverse direction are given as insets.
