CDC	Capacitance-to-Digital Converter
PM	Phase/Pulse Modulation
$\mathrm{\Delta }\mathrm{\Sigma }$M	$\mathrm{\Delta }\mathrm{\Sigma }$ Modulation
CSAR	Capacitive Successive Approximation Register
DR	Dynamic Range
IDCD	Iterative Delay-Chain Discharge
FPCB	Flexible Printed-Circuit Board
PDMS	Polydimethylsiloxane
ASIC	Application-Specific Integrated Circuit
SPI	Serial Peripheral Interface
CMOS	Complementary Metal–Oxide–Semiconductor
MEMS	Micro-Electro-Mechanical Systems
RO	Ring Oscillator
VCO	Voltage-Controlled Oscillator
MOM	Metal–Oxide–Metal
MIM	Metal–Insulator–Metal
SNR	Signal-to-Noise Ratio
ENOB	Effective Number Of Bits
DNL	Differential Non-Linearity
LSB	Least-Significant Bit
FoM	Figure of Merit