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. 2021 Dec 22;22(1):50. doi: 10.3390/s22010050

Table 1.

Comparative sensing performances of the piezoresistive-based sensor.

Material Structure Application Sensitivity Advantage Ref.
Metal alloy Circular
ultra-thin film
Tactile sensor (0.76–4.18) uS/bar High
sensitivity
[54]
Cr/Au Thick film
cruciform
Cantilever
Tactile force, shear stress, fluid flow 0.03 V/uN Flexible
High sensitivity
[55]
NiCr Thin planar Tactile sensor Curvature:
40 ppm
Force:
340 ppm/nN
230 ppm/µm
Stretchable [56]
Zr55Cu30Ni5Al10
metallic glass
Flexible
thin-film layer
Tactile sensor N/A Flexible
High sensitivity
[57]
Graphene Cylindrical film Accelerometer 2.6 mV g−1 Ultralight
High sensitivity
[58]
Carbon black
silicone composite
Thick film Pressure sensor N/A Stretchability
High sensitivity
[59]
Polysilicon Diaphragm Pressure sensor (3.35–3.74) mV/bar Single-pixel
mapping sensor
[60]
Silicone nanowire Cantilever Flow sensor 198 Ohm ms−1 High sensitivity
wide measure range
[61]
rGO foam 1 Foam Pressure sensor 22.8 kPa−1 Soft,
high accuracy,
sensitivity
[62]
GO-AgNF-PI 2 sponge Foam Pressure sensor 0.572 kPa−1 High sensitivity,
accuracy
[63]
rGO/PU 3 Thin foam Pressure sensor 0.67 kPa−1 Flexibility,
high sensitivity,
long time stability
[64]
Polysilicon Silk surface Monitoring human physiological signals 1.80 kPa−1 Wearability,
high sensitivity
[65]
PEDOT:PSS 4 Nanofibers Bending-insensitive pressure sensor array N/A Transparency,
flexibility,
wide measure range
[66]
Carbon Planar electrodes, pyramid Tactile sensor array −1.10 kPa−1 Flexibility,
position mapping,
good accuracy
[67]

1 rGO: Reduced graphene oxide. 2 AgNF: Silver nanofiber. PI: Polyimide. 3 PU: Polyurethane. 4 PEDOT:PSS: poly(3,4-ethylene dioxythiophene) polystyrene sulfonate.