Table 1.
Material | Structure | Application | Sensitivity | Advantage | Ref. |
---|---|---|---|---|---|
Metal alloy | Circular ultra-thin film |
Tactile sensor | (0.76–4.18) uS/bar | High sensitivity |
[54] |
Cr/Au | Thick film cruciform Cantilever |
Tactile force, shear stress, fluid flow | 0.03 V/uN | Flexible High sensitivity |
[55] |
NiCr | Thin planar | Tactile sensor | Curvature: 40 ppm Force: 340 ppm/nN 230 ppm/µm |
Stretchable | [56] |
Zr55Cu30Ni5Al10 metallic glass |
Flexible thin-film layer |
Tactile sensor | N/A | Flexible High sensitivity |
[57] |
Graphene | Cylindrical film | Accelerometer | 2.6 mV g−1 | Ultralight High sensitivity |
[58] |
Carbon black silicone composite |
Thick film | Pressure sensor | N/A | Stretchability High sensitivity |
[59] |
Polysilicon | Diaphragm | Pressure sensor | (3.35–3.74) mV/bar | Single-pixel mapping sensor |
[60] |
Silicone nanowire | Cantilever | Flow sensor | 198 Ohm ms−1 | High sensitivity wide measure range |
[61] |
rGO foam 1 | Foam | Pressure sensor | 22.8 kPa−1 | Soft, high accuracy, sensitivity |
[62] |
GO-AgNF-PI 2 sponge | Foam | Pressure sensor | 0.572 kPa−1 | High sensitivity, accuracy |
[63] |
rGO/PU 3 | Thin foam | Pressure sensor | 0.67 kPa−1 | Flexibility, high sensitivity, long time stability |
[64] |
Polysilicon | Silk surface | Monitoring human physiological signals | 1.80 kPa−1 | Wearability, high sensitivity |
[65] |
PEDOT:PSS 4 | Nanofibers | Bending-insensitive pressure sensor array | N/A | Transparency, flexibility, wide measure range |
[66] |
Carbon | Planar electrodes, pyramid | Tactile sensor array | −1.10 kPa−1 | Flexibility, position mapping, good accuracy |
[67] |
1 rGO: Reduced graphene oxide. 2 AgNF: Silver nanofiber. PI: Polyimide. 3 PU: Polyurethane. 4 PEDOT:PSS: poly(3,4-ethylene dioxythiophene) polystyrene sulfonate.