Table 2.

Parameters of the microcantilever and the self-excited system.

Description	Symbol	Value	Unit
Mass	m	1.37 $\times$ ${10}^{-6}$	$\mathrm{kg}$
Stiffness	k	260	$\mathrm{N}/\mathrm{m}$
Damping coefficient	c	0.12 $\times$ ${10}^{-3}$	Pa $·$ s
Capacitance	$C_1$	1.0 $\times$ ${10}^{-9}$	F
Sensibility of optical lever	$g_1$	-4.0 $\times$ ${10}^7$	V/m