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Design and fabrication process of TiN tube electrode. (a) Explosion view of the tube electrode system; (b) photograph of the fabricated tube electrode system; (c–e) steel tubes were cut, polished, and cleaned, before they were tightly packed, placed in the vacuum chamber, and finally coated by PVD with a TiN layer; (f) SEM image of the coating’s nano-rough TiN surface structure inside the tube electrodes.
