| MEMS/NEMS | Microelectromechanical System/Nano-electromechanical System |
| CVD | Chemical Vapor Deposition |
| PMMA | Polymethyl methacrylate |
| PDMS | Polydimethylsiloxane |
| SCG | Single-Crystalline Graphene |
| PCG | Poly-Crystalline Graphene |
| GO | Graphene Oxide |
| rGO | Reduced Graphene Oxide |
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