Table 2.

Soft bake temperatures and times for SU-8 2005.

$\raisebox{1ex}{$\mathit{R}\mathit{o}\mathit{t}\mathit{a}\mathit{t}\mathit{i}\mathit{o}\mathit{n}\mathit{a}\mathit{l} \mathit{S}\mathit{p}\mathit{e}\mathit{e}\mathit{d}$}\!\left/ \!\raisebox{-1ex}{$\mathit{T}\mathit{e}\mathit{m}\mathit{p}\mathit{e}\mathit{r}\mathit{a}\mathit{t}\mathit{u}\mathit{r}\mathit{e}$}\right.$	50 °C	65 °C	95 °C
2000 rpm	Not needed	2 min	4 min
4000 rpm	Not needed	2 min	4 min