Figure 22.

(a) Illustration of gravimetric SMR for operating in a liquid environment c-axis tilted AlN with Ir top and bottom electrodes. (b) Biosensing capability of the device demonstrated with the detection of varying concentrations of thrombin, by using a specific aptamer as a bioreceptor, with a reduction in frequency increasing with increase in target thrombin concentration due to mass loading [46]. Reproduced with permission from Mario DeMiguel-Ramos et al., Sensors and Actuators B: Chemical; published by Elsevier, 2017.