Schematics of various SAW mode biosensors. (a) SH-SAW biosensor with an Au IDT and sensing layer in the delay line configuration on bulk LiTaO3 [214]. Reproduced with permission from Junwang Ji et al., Sensors and Actuators B: Chemical; published by Elsevier, 2019. (b) FPW SAW biosensor with ZnO thin film piezoelectric layer. Functionalization of the sensor for biosensing is performed at the backside cavity. Reproduced with permission from J.-W. Lan et al. [261], Sensors; published by MDPI, 2016 (open access). (c) Love wave biosensor on a quartz substrate with SiO2 guiding layer and Au sensing layer on top of the guide in between the IDT [262]. Reproduced with permission from F. Di Pietrantonio et al., Sensors and Actuators B: Chemical; published by Elsevier, 2016. (d) SAW resonator for biosensing on LiTaO3 with an Au sensing layer in between the IDT and reflectors [263]. Reproduced with permission from Kai Chang et al., Biosensors and Bioelectronics; published by Elsevier, 2014. (e) SAW resonator biosensor on a sputter ZnO thin film [211]. Reproduced with permission from Jingting Luo et al., Biosensors and Bioelectronics; published by Elsevier, 2013.