Table 1.
Piezoelectric properties of the substrate and thin-film materials used in acoustic biosensing.
| Substrate | Electromechanical Coupling (%) |
Acoustic Wave Velocity (m/s) |
TCF (p pM/°C) | Dielectric Constant |
|---|---|---|---|---|
| 64° YX LiNbO3 | 11.0–11.5 | 4330–4742 | 70–81 | 85.2 |
| 36° YX LiTaO3 | 5.0–7.6 | 4100–4212 | 28–35 | 43 |
| X-112° Y cut LiTaO3 | 3300 | 18 | 43 | |
| ST-X Cut Quartz | 0.0016 | 3159 | 0 | 3.8 |
| Langasite (La3Ga5SiO14) | 0.8 | 2734 | 0 | 18.23 |
| ZnO | 1.5–1.7 | 6336 | −40~−60 | 8.66 |
| AlN | 3.1–8 | 11,050 | 19 | 8.5–10 |
| PZT | 20–35 | 4500 | - | 380 |
| PVDF | 2.9 | 2600 | - | 6–8 |