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. 2021 Dec 26;13(1):24. doi: 10.3390/mi13010024

Table 2.

SAW modes and characteristics and application in biosensing. Pictures from [209,236]. Reprinted (adapted) with permission from Jay W. Grate et al. [236], copyright 1993, American Chemical Society.

SAW Mode Device Configuration and Particle Displacement Profile Substrate Guide Layer Operating Frequency Substrate Thickness Application
R-SAW graphic file with name micromachines-13-00024-i001.jpg Quartz,
LiNbO3,
ZnO		 NA 30–300 MHz >>λ Gas sensing
SH-SAW-
Love Mode		 graphic file with name micromachines-13-00024-i002.jpg 36° YX LiTaO3,
ST-Quartz,
64° YX LiNbO3 		SiO2,
ZnO,
PMMA,
Photoresist		 30–500 MHz >>λ Gas sensing,
liquid sensing
Lamb Wave (FPW) graphic file with name micromachines-13-00024-i003.jpg ZnO,
AlN,
PZT		 NA 2–20 MHz <<λ Gas sensing,
liquid sensing
SH-A PM graphic file with name micromachines-13-00024-i004.jpg ST-Quartz
ZX LiNbO3 		NA 25–200 MHz 3–10 λ Gas sensing,
liquid sensing