Table 1.
Parameters of series resonator and shunt resonator.
| Resonator | Pitch (μm) | W (μm) | H1 (μm) | H2 (μm) | fs1 (GHz) | fp1 (GHz) | fs2 (GHz) | fp2 (GHz) |
|---|---|---|---|---|---|---|---|---|
| Series | 1.05 | 0.5 | 0.260 | 0.066 | 2.464 | 2.552 | 3.884 | 3.976 |
| Shunt | 1.05 | 0.5 | 0.277 | 0.175 | 2.392 | 2.476 | 3.785 | 3.879 |
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