Resulting composition of all analysed GDC thin films obtained by online-LASIL-ICP-MS and SEM-EDX measurements.
| Analysis technique | Gd cation fraction [cf. %] | Ce cation fraction [cf. %] |
|---|---|---|
| Nominal value | 10 | 90 |
| Online-LASIL-ICP-MS | 13 ± 0.5 (1 s, n = 18) | 87 ± 0.5 (1 s, n = 18) |
| SEM-EDX | 12 ± 0.8 (1 s, n = 6) | 88 ± 0.8 (1 s, n = 6) |