Table 1. Relative Intensity Ratios of Different Ga 3d and Sb 4d Components Normalized by the Corresponding Bulk (GaSb) XPS Signal Intensities^a.

Ga 3d	Ga2O/bulk	Ga2O3/bulk
native oxide	3.24	5.64
Ga HCl:IPA	1.39	2.43
Ga BOE 30:1	4.43	3.50

Sb 4d	metallic/bulk	Sb2O3/bulk	Sb2O5/bulk
native oxide	0.66	6.66	1.10
Sb HCl:IPA	0.22	0.85	0.38
Sb BOE 30:1	0.26	1.14	0.20

^aThe intensity of a doublet component is determined by the peak height and width, as fitted from the corresponding core-level spectrum.