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. 2022 Feb 17;13:918. doi: 10.1038/s41467-022-28579-z

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© The Author(s) 2022

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 4 — a CAD model showing the configuration of the 3D-printed microfluidic valve. The vent at the end of the control channel will be sealed via construction glass glue after clearing uncured resin. The inset gives the detailed structure of the membrane and the ramp. Schematic diagram showing the front b and side c sectional view of the valve filled with blue-dyed DI water in the open state. Schematic diagram showing the front d and side e sectional view of the valve in the closed state. The liquid cannot pass through. The membrane is fully conformal to the curved ramp surface under pressure. FEA simulation of the valve membrane deflection at different pressures. f 0 psi. g 4.7 psi. h 5.6 psi. The color heat map shows the von Mises stress on the membrane at these pressures. i Microscope image showing the top view of the valve in the open state. j Microscope image showing the top view of the valve in the closed state. The liquid between the ramp and the membrane is displaced. k Fabrication result of the microfluidic valve (isometric view). l Closing pressure test of the fabricated valve under varying fluid driving pressures. m Specimen platform for particle samples observation and measurement. The deflected membrane captures the green particles.