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The SEM images showing the cross-section of the fabricated HAR channels. (A) Cross-section of a parallelogram channel with AR lower than 3.5 (AR = 2.2, P–W13.5–H29.5). (B) Cross-section of a parallelogram channel with AR larger than 3.5 (AR = 3.8, P–W13.5–H51.0). (C) Cross-section of a rectangular channel with AR larger than 3.5 (AR = 3.8, R–W13.5–H51.0) (scale bar: 100 µm).
