Fig. 3. Nanoelectromechanical tuning of the resonances for intensity modulation.
a Schematic illustration of an array of pairs of the silicon nanobars. The grating consists of periodic pairs of the silicon bars. Pink and red colors represent ground, GND, and external bias, V0, respectively. Parameter definitions are shown in the illustration where l, w, g1, and g2 are the lattice constant of the grating, the width of the nanobar, the gap between the nanobars having a different bias, and the gap between the nanobars having the same bias, respectively. b and c Measured reflection spectra of TE-polarized lights for two different structures (see Table S1 for detailed design parameters). The spectra are measured under four different biases and plotted in different colors. The applied bias for each color is shown in legends. d and e Spectra of absolute modulation in reflection calculated from b and c. The applied bias for each color is shown in legends.