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. 2022 Feb 19;25(3):103942. doi: 10.1016/j.isci.2022.103942

Figure 3.

Figure 3

Growth controlling CVD process parameters

Schematic representing how different CVD process parameters (precursor, temperature, substrate, pressure, and carrier gas) affect the thermodynamics and kinetics of incoming adatoms in the CVD growth of 2D heterostructures.