| U11 | U22 | U33 | U12 | U13 | U23 | |
| Tm1 | 0.03208 (11) | 0.02149 (9) | 0.02871 (10) | −0.00610 (7) | −0.01104 (7) | −0.00037 (6) |
| O1 | 0.0419 (18) | 0.0381 (15) | 0.0329 (15) | −0.0097 (13) | −0.0122 (13) | 0.0087 (12) |
| O2 | 0.0425 (19) | 0.0590 (19) | 0.0446 (18) | −0.0195 (16) | −0.0225 (15) | 0.0214 (15) |
| O3 | 0.054 (2) | 0.0528 (18) | 0.0336 (17) | −0.0295 (16) | −0.0005 (15) | −0.0096 (14) |
| O4 | 0.0367 (17) | 0.0360 (14) | 0.0327 (15) | −0.0106 (13) | −0.0096 (13) | −0.0083 (12) |
| O5 | 0.049 (2) | 0.0259 (14) | 0.071 (2) | −0.0004 (14) | −0.0142 (17) | 0.0154 (14) |
| O6 | 0.061 (2) | 0.0425 (18) | 0.074 (2) | −0.0184 (17) | −0.0109 (19) | −0.0271 (17) |
| O7 | 0.0337 (18) | 0.0453 (18) | 0.061 (2) | −0.0087 (15) | −0.0182 (17) | 0.0238 (15) |
| O8 | 0.0377 (17) | 0.0431 (16) | 0.0277 (15) | −0.0052 (14) | −0.0104 (13) | −0.0040 (12) |
| N1 | 0.096 (4) | 0.106 (5) | 0.052 (3) | −0.064 (4) | −0.014 (3) | 0.014 (3) |
| N2 | 0.077 (3) | 0.0324 (19) | 0.047 (2) | −0.025 (2) | −0.012 (2) | −0.0010 (17) |
| N3 | 0.047 (3) | 0.0211 (17) | 0.087 (3) | −0.0036 (17) | 0.006 (2) | −0.0008 (19) |
| C1 | 0.045 (3) | 0.0304 (19) | 0.028 (2) | −0.0130 (18) | −0.0115 (18) | 0.0008 (16) |
| C2 | 0.041 (3) | 0.035 (2) | 0.032 (2) | −0.0134 (19) | −0.0137 (18) | 0.0021 (17) |
| C3 | 0.046 (3) | 0.050 (3) | 0.032 (2) | −0.025 (2) | −0.011 (2) | 0.0033 (19) |
| C4 | 0.042 (3) | 0.073 (3) | 0.042 (3) | −0.027 (3) | −0.012 (2) | −0.005 (2) |
| C5 | 0.086 (4) | 0.069 (3) | 0.033 (3) | −0.055 (3) | −0.010 (3) | −0.001 (2) |
| C6 | 0.071 (4) | 0.058 (3) | 0.052 (3) | −0.032 (3) | −0.029 (3) | 0.019 (2) |
| C7 | 0.052 (3) | 0.047 (3) | 0.047 (3) | −0.018 (2) | −0.018 (2) | 0.010 (2) |
| C8 | 0.040 (2) | 0.037 (2) | 0.025 (2) | −0.0137 (19) | −0.0115 (18) | 0.0023 (16) |
| C9 | 0.041 (2) | 0.0311 (19) | 0.026 (2) | −0.0114 (18) | −0.0125 (17) | −0.0005 (15) |
| C10 | 0.041 (3) | 0.033 (2) | 0.029 (2) | −0.0115 (18) | −0.0075 (18) | −0.0031 (16) |
| C11 | 0.045 (3) | 0.040 (2) | 0.029 (2) | −0.020 (2) | −0.0084 (19) | 0.0022 (17) |
| C12 | 0.064 (3) | 0.0270 (19) | 0.027 (2) | −0.018 (2) | −0.016 (2) | 0.0047 (16) |
| C13 | 0.052 (3) | 0.030 (2) | 0.036 (2) | −0.006 (2) | −0.006 (2) | −0.0047 (17) |
| C14 | 0.043 (3) | 0.041 (2) | 0.028 (2) | −0.014 (2) | −0.0059 (18) | −0.0004 (17) |
| C15 | 0.031 (2) | 0.0228 (18) | 0.045 (2) | −0.0109 (17) | −0.0009 (18) | −0.0006 (17) |
| C16 | 0.029 (2) | 0.0219 (17) | 0.0278 (19) | −0.0073 (15) | −0.0100 (16) | −0.0011 (14) |
| C17 | 0.041 (3) | 0.031 (2) | 0.038 (2) | −0.0037 (18) | −0.0210 (19) | 0.0019 (17) |
| C18 | 0.044 (3) | 0.036 (2) | 0.050 (3) | −0.011 (2) | −0.017 (2) | −0.013 (2) |
| C19 | 0.035 (2) | 0.0201 (17) | 0.050 (3) | −0.0087 (17) | −0.0014 (19) | 0.0031 (17) |
| C20 | 0.043 (3) | 0.039 (2) | 0.043 (3) | −0.002 (2) | −0.016 (2) | 0.0157 (19) |
| C21 | 0.044 (3) | 0.040 (2) | 0.030 (2) | −0.0086 (19) | −0.0168 (19) | 0.0002 (17) |
| O9 | 0.067 (3) | 0.148 (5) | 0.066 (3) | −0.019 (3) | −0.016 (2) | 0.010 (3) |