Figure 4.

Verification of resolution utilizing a QRM bar pattern phantom. A QRM-manufactured phantom including line and point patterns, Siemens stars and an L edge (a) was scanned at the Berkeley ALS and locally reconstructed to characterize the resolution of the combined lens system and camera detector. A portion of the reconstructed phantom is presented (b) showcasing line pairs ranging from 10 to 1 µm in width. A line profile of the indicated regions is shown, validating resolution up to 1 µm (c). A smaller line profile taken across the 1 µm line pairs that highlights signal shape is shown (d). Signal at the edges of line pairs is enhanced by phase effects caused by the silicon–air interface. Pixel counts between line pairs confirm reconstruction at 0.5 µm, as each line of the 1 µm pattern is 2 pixels thick.