Table 2. Specification of M5 collecting mirrors after the sample position.
Optic | M5a | M5b |
---|---|---|
Distance from source (mm) | 150 | 150 |
Shape | Tangential parabola | Tangential parabola |
Dimensions L × W × H (mm) | 190 × 30 × 40 | 190 × 30 × 40 |
Angle of grazing incidence (°) | 2 | 1 |
Coating | Ni, Pt | Rh, Ni |
Tangential radius (km) | Vertex radius = 0.3654 mm | Vertex radius = 0.0914 mm |
Off-axis position = 149.817 mm | Off-axis position = 149.954 mm | |
Sagittal radius (km) | >10 | >10 |
Tangential slope error (µrad, r.m.s.) | 2.9 (HighQ), 3.4 (LowQ) | 2.1 (HighQ), 1.9 (LowQ) |
Sagittal slope error (µrad, r.m.s.) | 4.8 (HighQ), 4.6 (LowQ) | 3.1 (HighQ), 2.3 (LowQ) |
Roughness (Å, r.m.s.) | 2.53 | 1.96 |
Manufacturer | Zeiss | Zeiss |