Table 6. List of manipulator motion axes with corresponding motion specifications.

Axis	Range	Minimum incremental step	Unidirectional reproducibility
x	±5 mm	<5 µm	0.5 µm
y	±5 mm	<5 µm	0.5 µm
z	±50 mm	<1 µm	0.5 µm
θ	>345°	<0.001°	<0.001°
χ	−30° → +45°	<0.05°	<0.05°
ϕ	±170°	<0.01°	<0.05°