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X-ray diffraction patterns of ZnO films deposited with different powers on glass substrates (oxygen partial pressure 0.01 Pa, total pressure 1 Pa): (a) 0.38 W/cm²; (b) 0.63 W/cm²; (c) 1.27 W/cm² Reprinted with permission from Ref. [36]. Copyright 1999 Elsevier.
