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. 2022 Mar 4;15(5):1908. doi: 10.3390/ma15051908

Table 1.

Selected results from the literature on the influence of working pressure and power density on the properties of ZnO and ZnS films (PW: power, PPa: pressure, Eg: gap energy optical, T: average transmittance in the visible range, D: the size of the crystallites); nominal power (unknown target size).

Target Pressure (Pa) Power Density (W·cm2) Crystalline Properties Optical Properties Ref
Gas Crystalline Quality D (nm) Transmission (%) Eg (eV)
ZnO 0.25Inline graphic6 0.38Inline graphic1.27 Inline graphicwith Pw 18 < D< 46 T > 90%
Inline graphicwith Ppa
Inline graphicwith Pw
- [36]
Ar
ZnS 0.1Inline graphic1.2 120 W Inline graphicwith Ppa
maximum
at 0.5 Pa
D < 17 T ≈ 70%
maximum
at 0.7 Pa
Inline graphicwith Ppa [37]
Ar
ZnS 0.1Inline graphic1.5 5Inline graphic20 Inline graphicwith Ppa
Inline graphicwith Pw
Inline graphicwith pw
19 < D < 20
T = 80% Inline graphicwith Ppa [38]
Ar
ZnS 1.33 4.25Inline graphic5.75 Max. at
4.6 W/cm2
35 < D < 70 T = 80% Eg = 3.3 eV [39]
Ar