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. 2022 Mar 4;15(5):1908. doi: 10.3390/ma15051908

Table 2.

Selection of results in the literature on the influence of oxygen on the properties of ZnOxS1−x films (Eg: optical gap energy, b: Bowing factor, T: mean transmittance in the visible range).

Technic Experimental Parameters Substrate Chemical Composition Crystalline Properties Morphology Optical Properties Ref.
Target Material T°
sputtering 60 W;
0.13 Pa
O2: 0Inline graphic2%		 Glass 164° 0.048 < O/
(S + O) < 0.82		 Hexagonal structure of the mesh parameter with O Granular surface
Grains < 50 nm		 - [41]
ZnS
sputtering 1 W/cm2;
1.33 Pa;
O2: 0Inline graphic1%		 Glass No 0.2 < O/
(S + O) < 0.95
ZnO0.05S0.95Inline graphicZnO0.71S0.29 		Of the mesh parameter and the intensity of O no diffractyion at the strong % O Granular surface cracking at high% O - [42]
ZnS
sputtering 2 W/cm2;
0.9 Pa;
O2: 0Inline graphic2.5%		 CIGS quartz 200° ZnSInline graphicZnO Hexagonal structure of the mesh parameter with O - T≈70%
2.6 < Eg < 3.6 eV
b = 3		 [43]
ZnS
sputtering 300 W;
Ar/O2:
1.1Inline graphic4.6%		 saphir 340° ZnOInline graphicZnO0.6S0.4 Hexagonal structure of the mesh parameter with O crystallites size: 60–70 nm 2.6 < Eg < 3.6 eV
b = 3		 [44]
ZnS [45]
sputtering 300 W ZnSInline graphicZnO - - 2.7 < Eg < 3.2 eV
b = 3.1		 [35]
ZnS
Co-pulverisation PZns = 45 W;
PZnO:
0Inline graphic120 W		 Si quartz 200° 0 < O/
(S + O) < 0.88		 Hexagonal structure of the mesh parameter with O Grains; crystallites < 120 nm T≈80
2.7 < Eg < 3.1 eV		 [46]
ZnS and ZnO
Co-pulverisation 0.07 Pa;
PznS = 45 w;
PZnO:
20Inline graphic120 W		 0.03 < S/
Zn < 0.90
ZnS and ZnO