Table 4.

Selection of results identified in the literature on the influence of experimental parameters on the properties of AZO films deposited by DC pulse spraying.

Experimental Parameters	Electrical Properties	Optical Properties	Ref.
0.6 Pa, 1 W/cm2, 30 kHz, 280 °C, O2 = 15%	ρ = 3.4 × 10−4 Ω·cm	T = 80%	[87]
70 kHz, 230 °C, 0.13 to 2 Pa	ρ = 2.2 × 10−3 Ω·cm for 0.4 Pa	T = 80% Eg = 3.6 eV	[88]
30 kHz, RT, 1 to 5.3 Pa	ρ = 1.2 × 10−4 Ω·cm for 2.7 Pa	T = 84%	[89]
4.5 W/cm2, 20 kHz, RT H2: 0 to 20 sccm	ρ = 4.10 × 10−4 Ω·cm for 14 sccm	T = 85%	[90]