Table 1.
Pitch Width (W0, μm) | Angle Related to Diffraction Only (°) | Angle Related to Interference Only (°) | Angle with Total Effect (°) |
---|---|---|---|
300 | 0.118 | 0.03 | 0.032 |
400 | 0.088 | 0.022 | 0.022 |
500 | 0.071 | 0.018 | 0.019 |
530 | 0.066 | 0.017 | 0.017 |
600 | 0.061 | 0.015 | 0.015 |
700 | 0.05 | 0.013 | 0.013 |
800 | 0.045 | 0.011 | 0.012 |
1000 | 0.035 | 0.0087 | 0.0098 |