Table 3. Thickness, Roughness, and Mass Density (ρ) of Each Layer Deduced by X-ray Reflectivity (XRR) Fitting for the Interfacial Layer with High Robust Mass Density (Figure 6(c))a.
In the XRR measurement, the ρ of the fitting parameter is proportional to electron density (ρ0). , where ρ0, A, λ, NA, Z, and f’ + if’’ are electron density, atomic weight, wavelength, Avogadro’s number, atomic number, and anomalous scattering factor of the atomic scattering factor.