Figure 1.
Diagram and detection mechanism of the LSPR- SiO2 vertical microcavity biosensor: (A) the process flow in biosensor fabrication, including the p-type silicon wafer, the SiO2 vertical microcavity, the adhesive layer deposition, the barrier layer deposition, the Ag-Au alloy thin film deposition and the NPG deposited biosensor die. (B) Schematic illustration of the structure of microcavity-LSPR biosensor. The sensor surface is immobilized with SARS-CoV-2 neutralizing antibodies for SARS-CoV-2 capture. (C) The optical signal response detection. If the sample contains target virus, a shift in reflectance spectrum will be observed; if no target virus presents, zero shift in the spectrum shift will be observed.