. 2022 Mar 15;15(6):2144. doi: 10.3390/ma15062144

Table 1.

Best-fit peak angular positions of GIXRD curves shown in Figure 2 referred to 0.6 (a) and 2.0 mm slit widths (b).

(a) Film (Volumetric Percentage)	1st Gaussian Peak (°)	2nd Gaussian Peak (°)
94% SiO₂ 6% Ta₂O₅	22.5 (2)	/
62% SiO₂ 38% Ta₂O₅	24.4 (2)	35.4 (4)
26% SiO₂ 74% Ta₂O₅	26.38 (6)	35.34 (9)
100% Ta₂O₅	27.35 (6)	35.30 (8)
(b) Film (Volumetric Percentage)	1st Gaussian Peak (°)	2nd Gaussian Peak (°)
94% SiO₂ 6% Ta₂O₅	19.8 (2)	/
62% SiO₂ 38% Ta₂O₅	24.12 (6)	34.5 (2)
26% SiO₂ 74% Ta₂O₅	26.24 (4)	35.02 (6)
100% Ta₂O₅	27.09 (3)	34.98 (4)