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Best fit parameter values refer to XRR curves shown in Figure 6.
| Film (Volumetric Composition) | Thickness (nm) | Density (g/cm3) | Roughness (nm) |
|---|---|---|---|
| 100% SiO2 | 55.2 (5) | 2.1 (1) | 2.7 (1) |
| 94% SiO2 6% Ta2O5 | 48.5 (5) | 3.2 (1) | 2.4 (1) |
| 62% SiO2 38% Ta2O5 | 54.7 (5) | 5.0 (1) | 1.9 (1) |
| 26% SiO2 74% Ta2O5 | 59.9 (5) | 6.7 (1) | 1.6 (1) |
| 100% Ta2O5 | 47.7 (5) | 8.0 (1) | 1.3 (1) |
