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. 2022 Mar 16;22(6):2307. doi: 10.3390/s22062307
keff2 Electromechanical Coupling Coeffecient
fc Center Frequency
ft Target Frequency
fr Resonance Frequency
fp Parallel Resonance Frequency
fs Series Resonance Frequency
fm Maximum Admittance Frequency
fn Minimum Admittance Frequency
e31,f Piezoelectric Constants of Thin Film, 31-Components
ηp Isotropic Loss Factor of Piezoelectric Material
SBW Sensitivity Fractional Bandwidth Product
BW Bandwidth
St(ω) Transmitting Sensitivity
Sr(ω) Receiving Sensitivity
Fpmut(ω) Round-Trip Sensitivity
ρc Acoustic Medium Density
pt Acoustic Pressure
qd Dipole Domain Source
utt Structural Acceleration
FA Force Per Unit Area
n Surface Normal
ZM Acoustic Impedance
ρM Matching Layer Density
cp Compression Wave Speed
rt Top Electrode Radius
rp Piezoelectric Layer Radius
rc Cavity Radius
rsi Half Pitch Length
te Electrode Thickness
tp Piezoelectric Layer Thickness
tsi Passive Diaphragm Thickness
tam Acoustic Matching Layer Thickness
tc Cavity Depth
tsub Substrate Thickness