Table 3.
Parameter setting of misalignment fault.
| Serial Number | Misaligned (Parallel) Level (μm) | Misaligned (Angle) Level (μm) |
|---|---|---|
| 1 | Initial | Initial |
| 2 | −500 | −3000 |
| 3 | −200 | −1500 |
| 4 | +200 | +3000 |
| 5 | +500 | +1500 |
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