Fig. 5.

Typical examples of the relative frequency distribution of position errors measured for a 1-µm bead along the x (a), y (b), and z (c) axis. The position of the 1-µm bead was evaluated for the 1D stepwise movement of 20 µm with a step of 250 nm (see inset in each panel). In each step, a 3D image with a volume of 120 ×120 × 20 µm³ (voxel size: 0.30 µm × 0.30 µm × 1.33 µm) was taken by single 2D scanning using a pixel dwell time of 1.2 µs.