FEC concentration dependence on the mechanical properties of SEI film structures.

	FEC concentration (vol%)
	0.0	1.0	3.0	5.0	10.0
B (GPa)	9.09 ± 0.87	13.34 ± 0.73	12.07 ± 0.82	11.28 ± 0.78	9.98 ± 0.67
G (GPa)	3.76 ± 0.30	4.36 ± 0.28	4.13 ± 0.23	4.00 ± 0.27	3.60 ± 0.17
E (GPa)	9.91 ± 0.92	11.79 ± 0.86	11.12 ± 0.80	10.73 ± 0.79	9.64 ± 0.76