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. Author manuscript; available in PMC: 2022 Aug 1.
Published in final edited form as: Sens Actuators A Phys. 2021 Feb 10;326:112602. doi: 10.1016/j.sna.2021.112602

Figure 3.

Figure 3.

Comparison of various actuation methods used for PMPs based on their (A) Operating voltage (B) Operating frequency (C) Power consumption (D) Package size (E) On-chip footprint (F) Self-pumping frequency (G) Self-pumping velocity and (H) Power flow rate efficiency. (I) Maximum differential pressure for continuous and discrete -scheme PMPs. Performance characteristics are reported at maximum flow rate.