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. 2022 Apr 2;55(Pt 2):362–369. doi: 10.1107/S1600576722002230

Table 1. Predicted and fitted thin-film parameters based on the reflectivity data of a PDI-C8 film on Si/SiO x (shown in Fig. 5).

The ground truth labels were obtained via a manually supervised LMS fit. After applying the described q z variation, the prediction results improved significantly. A subsequent LMS refinement only led to comparatively small improvements.

  Thickness (Å) Roughness (Å) SLD (× 10−6 Å−2)
Ground truth 688.3 27.1 10.5
Prediction 536.7 30.3 11.2
Shift + prediction 690.8 31.0 11.0
Shift + prediction + fit 690.5 27.5 10.8