Table 1. Predicted and fitted thin-film parameters based on the reflectivity data of a PDI-C8 film on Si/SiO x (shown in Fig. 5 ▸).
The ground truth labels were obtained via a manually supervised LMS fit. After applying the described q z variation, the prediction results improved significantly. A subsequent LMS refinement only led to comparatively small improvements.
| Thickness (Å) | Roughness (Å) | SLD (× 10−6 Å−2) | |
|---|---|---|---|
| Ground truth | 688.3 | 27.1 | 10.5 |
| Prediction | 536.7 | 30.3 | 11.2 |
| Shift + prediction | 690.8 | 31.0 | 11.0 |
| Shift + prediction + fit | 690.5 | 27.5 | 10.8 |