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Manual FIB-milling and thinning parameters on the Helios cryo-FIB/SEM.
| Lamella thickness (µm) | Milling angle | Milling Current (nA) | Pattern type | |
|---|---|---|---|---|
| Rough Milling | 3 | 17° | 0.79 | Rectangle |
| Medium Milling | 2 | 17° | 0.43 | Rectangle |
| Fine Milling | 1.5 | 17° | 0.23 | Rectangle |
| Over/Under-tilt | 1 | 16.5°, 17.5° | 0.23 | CCS |
| Polishing 1 | 0.30 | 17° | 0.080 | CCS |
| Polishing 2 | 0.20 | 17° | 0.024 | CCS |
