Table 2.

AutoTEM Cryo 2.2 FIB-milling and thinning parameters on the Aquilos 2.

	Lamella thickness (defined as “Pattern Offset”) (µm)	Front Width Overlap (µm)	Rear Width Overlap (µm)	Milling Current (nA)	Pattern Type	DCM Rescan Interval (s)
Rough Milling	1.0	1.5	1.0	1.0	Rectangle	120
Medium Milling	0.8	0.65	0.5	0.5	CCS	90
Fine Milling	0.6	0.35	0.1	0.3	CCS	60
Finer Milling	0.4	0.05	0.05	0.3	CCS	30
Polishing 1	0.15	N/A	N/A	0.03	CCS	30
Polishing 2	0	N/A	N/A	0.01	CCS	10

Milling and thinning were done at 20°, and a depth correction of 100% and 0° overtilt at 30 kV while polishing steps were set to 160%.