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Fundamental characteristics of LIG humidity sensor at different device designs
(A) LIG interdigital electrode design and definition of electrode distance and width. Multiple cycle resistance measurements of ZIS sensor at (B) D = 0.1 mm, (C) D = 0.2 mm, (D) D = 0.4 mm, (E) T = ∼2.5 μm, (F) T = ∼5 μm, and (G) T = ∼15 μm under humidity change from RH40 to 75%. RH value was also measured with a commercial humidity sensor in the oven.
