FIG. 5.
(a) Schematic of the proportional microvalve having piezoelectric unimorph microactuator and the CAD drawing of valve holder, (b) Assembled valve holder having microvalve placed in it, suitable to place in the architecture shown in Fig. 2.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.